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White light interferometer is an instrument used to measure the surface of nano-scale precision devices. It is based on the principle of white light interference technology. The light emitted by the light source is divided into two beams after beam expansion and collimation, one beam is reflected by the measured surface, the other beam is reflected by the reference mirror, and the last two reflected beams converge and interfere. Microscope transforms the morphological characteristics of the measured surface into interference fringe signals, and measures the three-dimensional morphology of the surface by measuring the changes of interference fringes.

White light interferometer is specially used for non-contact rapid measurement, and the measurement accuracy of surface roughness, micro-contour and key parts size of precision parts can reach nanometer level! At present, in the field of three-dimensional measurement, white light interferometer is one of the most accurate measuring instruments.

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