What does ESD mean?

ESD (electrostatic discharge) means "electrostatic discharge". ESD is a discipline that has been formed since the mid-20th century to study the generation, harm and protection of static electricity. Therefore, it is customary in the world to refer to the equipment used for electrostatic protection as ESD, and the Chinese name is electrostatic impedance.

There are two kinds of damage and destruction caused by ESD to electronic products: sudden damage and potential damage. The so-called sudden damage refers to serious damage to the equipment and loss of function. This kind of damage can usually be found in the quality inspection in the production process, so it mainly brings the cost of rework and maintenance to the factory.

Potential damage refers to the partial damage of the equipment, whose function has not been lost, which can not be found in the inspection of the production process, but it will make the product unstable, and sometimes it will be used badly, thus causing great harm to the product quality.

Extended data:

Problems caused by electrostatic discharge:

Although the total amount of static electricity transferred when ESD occurs is usually very small (nano-Coulloume level), the discharge energy accumulates in a small area on the silicon wafer. Electrostatic discharge within a few nanoseconds can generate a peak current exceeding 1A, which can simply evaporate the metal line and penetrate the oxide layer. Discharge may also be the cause of gate oxide breakdown.

Another main problem is that once there is charge accumulation on the surface of silicon wafer, the electric field generated by it will attract charged particles or polarization and attract neutral particles to the surface of silicon wafer. One example is that TV screens attract dust. In addition, the smaller the particles are, the more obvious the electrostatic attraction is.

As the critical dimensions of devices shrink, the attraction of ESD to smaller particles becomes more and more important, which may lead to fatal defects. In order to reduce the pollution of small particles, it is necessary to control the discharge of silicon wafers.

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